Microlithography

  用于duv光刻掩膜优化算法的模型，包含部分相干光照明，光刻胶分层模型，具体考虑了瞳孔放大系数，以及电磁波的畸变等因素。(The model for DUV photolithography optimization algorithm, including partially coherent light illumination and photoresist stratification model, takes into account the factor of pupil magnification and electromagnetic wave distortion.)

Microlithography\@Litho\computeImage.m, 7246 , 2015-01-19
Microlithography\@Litho\computePixelMaskSpectrum.m, 183 , 2017-09-07
Microlithography\@Litho\computeSource.m, 1749 , 2017-09-14
Microlithography\@Litho\computeSystem.m, 1000 , 2017-10-27
Microlithography\@Litho\Litho.m, 3174 , 2017-10-27
Microlithography\addPathToKernel.m, 84 , 2016-10-13
Microlithography\ComputeEPE.m, 656 , 2017-05-25
Microlithography\computeHp.m, 1938 , 2017-01-04
Microlithography\computeHpSD.m, 1690 , 2017-08-27
Microlithography\computeHpSD_1.m, 1768 , 2017-06-15
Microlithography\computeJCC.m, 2420 , 2017-06-26
Microlithography\computeVectorM.m, 1598 , 2017-06-15
Microlithography\computeVectorM_1.m, 1663 , 2017-06-15
Microlithography\computeVectorT.m, 681 , 2017-06-15
Microlithography\computeVectorT_1.m, 744 , 2017-09-13
Microlithography\conv2mtx_same.m, 1534 , 2013-08-20
Microlithography\ConvInFreq.m, 474 , 2017-03-31
Microlithography\CSTIC2017PrepImage.m, 460 , 2016-12-14
Microlithography\evolve_normal_ENO2_modified.m, 1582 , 2017-06-14
Microlithography\FindSmallestTwoExpo.m, 103 , 2016-10-21
Microlithography\GetZernikeXYPoly.m, 3260 , 2017-10-27
Microlithography\gssLitho.m, 1675 , 2017-05-19
Microlithography\gssMO.m, 2008 , 2017-06-13
Microlithography\imageEPS.m, 493 , 2017-08-24
Microlithography\images\img11.bmp, 5690 , 2017-11-04
Microlithography\images\img12.bmp, 5690 , 2017-11-04
Microlithography\images\img13.bmp, 5690 , 2017-11-04
Microlithography\images\img14.bmp, 5690 , 2017-11-04
Microlithography\images\img15.bmp, 5690 , 2017-11-04
Microlithography\images\img9.bmp, 5690 , 2017-09-08
Microlithography\images\img9c.bmp, 1678 , 2017-09-08
Microlithography\images\resm11.bmp, 67898 , 2017-11-08
Microlithography\images\resm12.bmp, 67898 , 2017-11-08
Microlithography\images\resm13.bmp, 67898 , 2017-11-08
Microlithography\images\resm14.bmp, 67898 , 2017-11-08
Microlithography\images\resm15.bmp, 67898 , 2017-11-08
Microlithography\images\ress11.bmp, 2006 , 2017-11-08
Microlithography\images\ress12.bmp, 2006 , 2017-11-08
Microlithography\images\ress13.bmp, 2006 , 2017-11-08
Microlithography\images\ress14.bmp, 2006 , 2017-11-08
Microlithography\images\ress15.bmp, 2006 , 2017-11-08
Microlithography\images\resultphoto.m, 1393 , 2017-11-08
Microlithography\ImageVelocity.m, 4468 , 2017-06-02
Microlithography\LithoFconju.m, 4514 , 2017-06-18
Microlithography\main_CalcVectorAerial.m, 2919 , 2016-10-15
Microlithography\maskContour.m, 282 , 2017-05-25
Microlithography\Partially\ImageVelocity.m, 1858 , 2017-09-14
Microlithography\Partially\LithoMOconjuP.m, 4025 , 2017-09-08
Microlithography\Partially\main_Litho.m, 1559 , 2017-09-08
Microlithography\PPPPPpengfei_test1.m, 71 , 2017-09-08
Microlithography\PrepSystem.m, 1808 , 2017-06-24
Microlithography\PrepSystemMO.m, 1615 , 2017-08-27
Microlithography\PrepSystemMOconju.m, 1632 , 2017-06-15
Microlithography\rotate90Hp.m, 788 , 2016-10-23
Microlithography\sigmoid_syj.m, 622 , 2009-03-11
Microlithography\SOcomputeT.m, 918 , 2017-06-26
Microlithography\SOconju.m, 4712 , 2017-06-26
Microlithography\source_ADDA.m, 3236 , 2017-09-15
Microlithography\source_ADG.m, 3625 , 2017-09-17
Microlithography\source_RMS.m, 3061 , 2017-09-14
Microlithography\SOVelocity.m, 662 , 2017-05-18
Microlithography\SOVelocityNW.m, 954 , 2017-05-21
Microlithography\Stratifeid\@Layer\computeM.m, 361 , 2017-09-06
Microlithography\Stratifeid\@Layer\Layer.m, 776 , 2017-09-12
Microlithography\Stratifeid\@stack\computemsp.m, 603 , 2017-09-06
Microlithography\Stratifeid\@stack\computeRT.m, 815 , 2017-09-06
Microlithography\Stratifeid\@stack\multiple.asv, 503 , 2017-09-06
Microlithography\Stratifeid\@stack\stack.m, 684 , 2017-09-06
Microlithography\Stratifeid\computeHp.m, 8470 , 2017-09-14
Microlithography\Stratifeid\ED.asv, 1597 , 2017-10-27
Microlithography\Stratifeid\ED.m, 1613 , 2018-02-14
Microlithography\Stratifeid\ImageVelocity.m, 5055 , 2017-09-14
Microlithography\Stratifeid\iteration_get.m, 1989 , 2017-09-19
Microlithography\Stratifeid\Mask_inverse.m, 4141 , 2017-09-19
Microlithography\Stratifeid\multiple.m, 440 , 2017-09-06
Microlithography\Stratifeid\PrepSystem.m, 1993 , 2018-01-05
Microlithography\test.m, 3429 , 2016-10-17
Microlithography\testConv.m, 463 , 2017-04-25
Microlithography\testLitho.m, 3473 , 2017-08-26
Microlithography\testLithoF.m, 3919 , 2017-08-21
Microlithography\testLithoFconju.m, 3847 , 2017-05-31
Microlithography\testSO.m, 3197 , 2017-05-25
Microlithography\testSOconju.m, 3263 , 2017-06-19
Microlithography\testSOnarrow.m, 3180 , 2017-05-19
Microlithography\testSOnarrowConju.m, 3299 , 2017-06-19
Microlithography\test_ILT.m, 3255 , 2016-10-20
Microlithography\ttest.m, 654 , 2017-04-01
Microlithography\VectorModelGk.m, 1825 , 2017-05-12
Microlithography\VectorModelImage.m, 2935 , 2017-01-04
Microlithography\VectorModelImageSD.m, 1612 , 2016-10-27
Microlithography\VectorModelImageSO.m, 793 , 2017-06-16
Microlithography\VectorModelImageTest.m, 2265 , 2017-03-31
Microlithography\VectorModelVelocity.m, 3277 , 2017-01-04
Microlithography\VectorModelVelocitySD.m, 1553 , 2017-05-25
Microlithography\VectorModelVelocityTest.m, 3430 , 2017-05-24
Microlithography\VnIntermediate.m, 742 , 2016-10-23
Microlithography\Stratifeid\@Layer, 0 , 2018-04-14
Microlithography\Stratifeid\@stack, 0 , 2018-04-14
Microlithography\Stratifeid\data, 0 , 2018-04-14
Microlithography\@Litho, 0 , 2018-04-14